Browsing by Author "Bourov, Anatoly"
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Air bubble-induced light-scattering effect on image quality in 193 nm immersion lithography
Fan, Yongfa; Lafferty, Neal; Bourov, Anatoly; Zavyalova, Lena; Smith, Bruce (Optical Society of America, 2005-07-01)As an emerging technique, water immersion lithography, offers the capability of reducing critical dimensions by increasing the numerical aperture that is due to the higher refractive indices of immersion liquids than ... -
A systematic approach to determining the limits of nanolithography at extreme NA
Bourov, Anatoly (2008-01)In optical imaging, separating the impact of the projection tool from the characteristics of the detector is key to understanding the limits of any exposure system. In semiconductor photolithography the detector is ...