Browsing by Author "Van Hart, D."

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    • Surface composition and distribution of fluorine in plasma-fluorinated polyimide 

      Matienzo, L.; Emmi, F.; Egitto, F.; Van Hart, D.; Vukanovic, V.; Takacs, Gerald (The American Vacuum Society: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, 1988-05)
      Surface composition, fluorine distribution, and morphology were determined for polyimide films modified downstream from microwave plasmas containing CF4/O2. Complementary analytical techniques including x-ray photoelectron ...