Browsing Meeting minutes, announcements and publications from RIT Colleges by Author "Lane, Richard"
Now showing items 1-1 of 1
-
Development and characterization of nitride and oxide based composite materials for sub 0.18 μm attenuated phase shift masking
Smith, Bruce; Alam, Zulfiqar; Butt, Shahid; Kurinec, Santosh; Lane, Richard; Arthur, Graham (Elsevier Science B.V., Amsterdam, 1997-02)Results are presented from investigations into the UV properties of various oxide, nitride, and intermetallic materials for application as attenuated phase shift masking films for 248 and 193 nm wavelengths. There are ...