Browsing Meeting minutes, announcements and publications from RIT Colleges by Subject "Imaging systems"
Now showing items 1-2 of 2
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Quarter-micron lithography with a gapped Markle-Dyson system
(American Vacuum Society, 1994-11)0.25-µm lithography has previously been demonstrated using an ungapped prototype Markle–Dyson system, in which the wafer was held in soft contact with the mask. However, such an in-contact scheme would be inappropriate for ... -
Solid-state array cameras
(Optical Society of America, 1972-05)Over the past few years there has been growing interest shown in the rapidly maturing technology of totally solid-state imaging. This paper presents a synopsis of developments made in this field at the Westinghouse ATL ...