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A novel ultra-violet assisted anisotropic etching of plastic to realize micro-gears
(Elsevier: Sensors and Actuators A: Physical, 2004-09-21)
An ultraviolet assisted chemical etching of plastic is reported in which the etching of PET substrates is anisotropic in the direction of
light illumination. A strong solvent as di-methyl-formamide (DMF) is exploited to ...