Browsing Citations Only by Author "Fan, Yongfa"
Now showing items 1-1 of 1
-
Air bubble-induced light-scattering effect on image quality in 193 nm immersion lithography
Fan, Yongfa; Lafferty, Neal; Bourov, Anatoly; Zavyalova, Lena; Smith, Bruce (Optical Society of America, 2005-07-01)As an emerging technique, water immersion lithography, offers the capability of reducing critical dimensions by increasing the numerical aperture that is due to the higher refractive indices of immersion liquids than ...