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Plasma and beam facility atomic oxygen erosion of a transition metal complex

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dc.contributor.author Illingsworth, Marvin en_US
dc.contributor.author Banks, B. en_US
dc.contributor.author Smith, James en_US
dc.contributor.author Jayne, D. en_US
dc.contributor.author Garlick, R. en_US
dc.contributor.author Rutledge, S. en_US
dc.contributor.author de Groh, K. en_US
dc.date.accessioned 2006-07-19T19:39:39Z en_US
dc.date.available 2006-07-19T19:39:39Z en_US
dc.date.issued 1996-06 en_US
dc.identifier.citation Plasma Chemistry and Plasma Processing 16N2 (1996) 209-225 en_US
dc.identifier.issn 1572-8986 en_US
dc.identifier.uri http://hdl.handle.net/1850/2168 en_US
dc.description RIT community members may access full-text via RIT Libraries licensed databases: http://library.rit.edu/databases/
dc.description.abstract Glassy residues of the complex bis(N,N-disalicylidene-1,2-phenylenediamino)zirconium(IV), Zr(dsp)2, on glass slides were exposed to atomic oxygen in a plasma asher or an atomic beam facility for various amounts of lime in order to study the erosion process, determine the rate of erosion, and learn the chemical identity of the residue. The exposed films were characterized by weight loss, optical photography, profilometry, diffuse reflectance and total transmittance spectroscopy, scanning electron microscopy (SEM) with wavelength dispersive X-ray spectrometry (WDS), X-ray diffraction, and X-ray photoelectron spectroscopy (XPS). Results indicate that these films erode much more slowly polyimide (Kapton) film under identical conditions, that the erosion is very nonuniform, and that zirconium dioxide is the predominant product after extended exposure. This complex is currently being evaluated as a polymer additive. en_US
dc.format.extent 43151 bytes en_US
dc.format.mimetype application/pdf en_US
dc.language.iso en_US en_US
dc.publisher Springer-Verlag: Plasma Chemistry and Plasma Processing en_US
dc.subject Atomic oxygen en_US
dc.subject Erosion en_US
dc.subject Plasma en_US
dc.title Plasma and beam facility atomic oxygen erosion of a transition metal complex en_US
dc.type Abstract en_US
dc.identifier.url http://dx.doi.org/10.1007/BF01570179

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