Review of fabrication of nanochannels for single phase liquid flow
Abstract
Abstract The topic of single phase liquid flow in submicron
or nanochannels is a nascent field. There have
only been a couple papers that have dealt with this area
directly. The most probable reason for this is that currently
most research in fluid mechanics or heat transfer
is being focused on micron size channels. To help facilitate
researchers to focus on this undeveloped area, this
paper serves as a review for some of the micro-fabrication
processes that will make it possible for engineers
and scientists to study this field in greater detail.