Review of fabrication of nanochannels for single phase liquid flow

Abstract

The topic of single phase liquid flow in submicron or nanochannels is a nascent field. There have only been a couple papers that have dealt with this area directly. The most probable reason for this is that currently most research in fluid mechanics or heat transfer is being focused on micron size channels. To help facilitate researchers to focus on this undeveloped area, this paper serves as a review for some of the micro-fabrication processes that will make it possible for engineers and scientists to study this field in greater detail.