Atmospheric microplasma in a wide-slit configuration for nanofabrication
| dc.contributor.author | Wagner, A. | |
| dc.contributor.author | Mariotti, Davide | |
| dc.date.accessioned | 2009-06-25T19:49:16Z | |
| dc.date.available | 2009-06-25T19:49:16Z | |
| dc.date.issued | 2008-11 | |
| dc.identifier.citation | 30th International Symposium on Dry Processes (2008) | en_US |
| dc.identifier.uri | http://hdl.handle.net/1850/9973 | |
| dc.description | Poster at the 30th International Symposium on Dry Processes, 26-28 November 2008, Tokyo, Japan. | en_US |
| dc.language.iso | en_US | en_US |
| dc.publisher | Dry Process Symposium | en_US |
| dc.title | Atmospheric microplasma in a wide-slit configuration for nanofabrication | en_US |
| dc.type | Other | en_US |