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Investigation of microplasma cells fabricated on silicon wafer

dc.contributor.authorAbalo-Akuvi, Koffi
dc.contributor.authorMariotti, Davide
dc.date.accessioned2009-06-25T19:52:05Z
dc.date.available2009-06-25T19:52:05Z
dc.date.issued2008-05
dc.identifier.citation26th Annual Conference on Microelectronic Engineering (2008)en_US
dc.identifier.urihttp://hdl.handle.net/1850/9988
dc.descriptionNon-presenting author at the 26th Annual Conference on Microelectronic Engineering, 12-14 May 2008, Rochester (NY), USA. Held by the Microelectronic Engineering program of the Rochester Institute of Technology (RIT).en_US
dc.language.isoen_USen_US
dc.publisherRochester Institute of Technologyen_US
dc.titleInvestigation of microplasma cells fabricated on silicon waferen_US
dc.typeProceedingsen_US


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